세미랩코리아

DLS

DLS Deep Level Transient Spectrometer provides metrology of the highest sensitivity for characterization and identification of impurities and defects (known as traps) for the wafermaker market and research institutes.
The new technologies - a low-vibration cryostat with improved signal-to-noise ratio, a more accurate temperature controller and the improved evaluation software - allow for automatic control of the experimental parameters and automatic evaluation of trap concentration, activation energy and capture cross section on semiconductor samples.

Features and System specifications:

Highest sensitivity (2*108 atoms/cm3) for detection of trace levels of contamination

Interfacing to a broad range of cryostats

Wide range of measurement modes:

•temperature scan

•frequency scan

•depth profiling

•C-V characterization

•capture cross section measurement

•optical injection

•conductance transient measurements

Controlled by digital and analog settings to allow real ease of operation

Sample quality test by I-V, C-V

Full computer control with extensive software support, complete library database for accurate contamination identification