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WT

The WT product line is a powerful measurement platform for performing many different semiconductor material characterization measurements. The base system includes all the overhead functions necessary to perform characterization measurements, including power supplies, computer and operating software, X-Y measurement stage and so on. The WT is typically used to make maps, where the wafer is scanned at a programmable raster. Each system is configured to the user’s requirements by adding treatment and measurement capabilities.

Features and System specifications:

•Wafer handling: Robot up to 300 mm

•Cleanroom class: class 1 minienvironment

•Treatments:

•Hot chuck / desorber

•Linear corona charger and pin charger

•Optical flash

•High temperature RTP