Features and System specifications:

  •Wafer size: 150/200 – 300 mm

  •Two Load Ports (FOUP/SMIF)

  •Fixed entrance slit and fixed spectral range for the spectrographs

  •High performance grating

  •High performance detectors

  •Fast automatic focus (with distance sensor)

  •High speed x,y,z stage

  •Automated measurement and analysis

  •Windows® 10 operating system for multi-tasking

  •SAM™ user interface compliant to SEMI® standard (E95-0200)