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Corema

Semilab's COREMA system is based on a contactless capacitance technique used for precise resistivity characterization of semi-insulating compound semiconductors over a wide resistivity range, useful for the device manufacturing industry.
Knowing the uniformity of resistivity and mobility values is critical to achieve process optimization.
Mapping is critical for semi-insulating semiconductor QA processes as they show inhomogeneities that occur during manufacturing.

Features and System specifications:

Application:

  •Measures compound semiconductors: GaAs, SiC, GaN, CdTe, InP

  •Resistivity measurement of compound semiconductors over a wide range (1x105-1x1012 Ωcm)


Features:

  •Manual wafer handling up to 200 mm

  •Mapping capability

  •Colored topogram display of full wafer

  •Semi-automatic pneumatic placement

  •User-friendly measurement control software


Benefits:

  •Contactless, non-destructive measurement over the entire wafer surface

  •Fast evaluation

  •Excellent repeatability

  •No calibration necessary