Features and System specifications:

  •Wafer handling: Robot up to 300 mm

  •Inspected area: Full sheet wafers

  •Probes: 4PP (FEOL & BEOL) , EDDY (BEOL) , JPV (FEOL)

  •1-4 permanent 4PP heads for different ranges & applications, Lower CoO

  •Cleanroom class: class 1 minienvironment