본문 바로가기 주메뉴 바로가기

SPL

SPL은 여러 재료의 전자 구조를 조사하기 위한 비접촉 및 비파괴 분광학 기반의 측정 시스템입니다.

Features and System specifications:

  •Wafer size: 150/200 – 300 mm

  •Two Load Ports (FOUP/SMIF)

  •Fixed entrance slit and fixed spectral range for the spectrographs

  •High performance grating

  •High performance detectors

  •Fast automatic focus (with distance sensor)

  •High speed x,y,z stage

  •Automated measurement and analysis

  •Windows® 10 operating system for multi-tasking

  •SAM™ user interface compliant to SEMI® standard (E95-0200)